Glass-like Carbon
 - Glass-like Carbon has a pore-free and amorphous structure like that of glass and combines the features of carbon with those of glass.
It has a high corrosion resistance, high hardness, high uniformity, and less particle.
Considering the characteristics, Glass-like Carbon is used in Semiconducor Manufacturing Process, heat treatment Process etc.
Features
- High Thermal Resistance
- High Corrosion Resistance
- High Erosion Resistance
- High Uniformity
- High Hardness
- High Purity
- Low Coefficient of thermal expansion
Characteristics
| |
Unit |
Glass-like Carbon |
Quartz |
Aluminum |
| Bulk Density |
kg/m3 |
1,530 |
2,200 |
2,700 |
| Bending Strength |
MPa |
150 |
50 |
− |
| Tensile Strength |
MPa |
− |
− |
205 |
| Young's Strength |
GPa |
23 |
73 |
69 |
| Shore Modulus |
− |
127 |
− |
− |
| Specific Resistance |
Ω−m |
4.4 × 10–5 |
− |
− |
| Cofficient of thermal expansion |
X ~10–6/ºC |
3.7 |
0.5 |
21.0 |
| Specific Heat |
J/gK |
0.75 |
0.8 |
0.9 |
| Thermal Conductivity |
W/mK |
7 |
1.3 |
203 |
urity
(Ash Content) |
ppm |
10 ≧ |
− |
− |
|