Ceramics Electrostatic Chuck (ESC)

We provide fine ceramics Electrostatic Chuck (ESC) with high chucking force and quick response in vacuum and air atmosphere.

Features

• Workable with low voltage
• Quick response
• Workable in vacuum and air atmosphere
• High thermal conductivity

Applications

• Silicon wafer,
• LCD glass,
• Polyethylene film, etc

Example of products

SiC-ESC Wafer carrier arm	SiC-ESC (Comb type) For LCD glass

ESC with cooling plate