Photosensitive Dry Film "Photec"
 - RD series and DL series are fully aqueous applicable photosensitive films used for direct imaging system. These series have high photosensitivity, high resolution, excellent imaging property and other advantages than conventional films.
Features
RD Series
- High photosensitivity: 15~29mJ/cm2 (RD-1000 series, By Paragon-9000m of Orbotech)
- High resolution: L/S=12/12µm (RD-1225, By Paragon-Ultra of Orbotech and DE-6UH of Hitachi Via mechanics)
- It is used for digital light processing (DLP) system and UV laser direct imaging (UV-LDI) system both.
- Because of high imaging property, it is able to confirm the exposed area at 1minute after exposure .
Photo characteristics
| Item |
Unit |
RD-1010 |
RD-1015 |
RD-1020 |
RD-1125 |
RD-1225 |
| Thickness |
μm |
10 |
15 |
20 |
25 |
25 |
| Wavelength |
nm |
355*1 |
405*2 |
355*1 |
405*2 |
355*1 |
405*2 |
355*1 |
405*2 |
355*1 |
405*2 |
| Exposure energy |
mJ/cm2 |
15~27 |
23~46 |
15~28 |
24~47 |
16~29 |
25~49 |
55~110 |
50~100 |
70~135 |
60~120 |
| Recommended ST |
x/41 |
11~17 |
20~26 |
12~18 |
20~26 |
12~18 |
| Resolution*3 |
x/xμm |
12 |
15 |
18 |
10 |
9*5 |
8 |
8 |
| Adhesion*3 |
x/3xμm |
12 |
15 |
18 |
12 |
10*5 |
8 |
8 |
| Imaging property*4 |
— |
7 |
8 |
9 |
15 |
15 |
| *1: |
RD-1000: By Paragon-9000m of Orbotech, RD-1125/1225: By Paragon-Ultra of Orbotech, |
| *2: |
RD-1000: By DE-1AH of Hitachi Via Mechanics, RD-1125/1225: By DE-6UH of Hitachi Via Mechanics |
| *3: |
RD-1000: ST=14/41, RD-1125/1225: 355nm; ST=23/41, 405nm; ST=15/41 Minimum developing time×2 |
| *4: |
RD-1000: ST=14/41, RD-1125/1225: 355nm; ST=23/41, 405nm; ST=15/41 Value at 1minute after exposure |
| *5: |
-4.65μm (Offset value by DE-1AH of Hitachi Via Mechanics) |
Resist profile(RD-1010 ST=14/41)
 |
 |
L/S=12/12μm;355nm
( By Paragon-9000m of Orbotech ) |
L/S=12/12μm;405nm
( By DE-1AH of Hitachi Via Mechanics ) |
Resist profile(RD-1125 ST=15/41)
 |
 |
L/S=12.5/12.5μm;355nm
( By Paragon-9000m of Orbotech ) |
L/S=14/14μm;405nm
( By DE-1AH of Hitachi Via Mechanics ) |
Imaging property of RD-1125
 |
| RD-1125(35mJ/cm2) |
*By Paragon-9000m of Orbotech,
Appearance of 1 minute after exposure. |
Features
DL Series
- DL series have high photosensitivity (11~27mJ/cm2: recommended exposure energy),
excellent adhesion and resolution than conventional films.
- It is used for digital light processing (DLP) system.
- Because of good contrast, it is able to confirm the exposed area at 1minute after exposure .
Photo characteristics
| Item |
Unit |
DL-1229 |
DL-1232 |
DL-1238 |
| Applications |
— |
Tenting Etching |
| Thickness |
μm |
29 |
32 |
38 |
| Exposure energy(ST=14/41) |
mJ/cm2 |
16 |
17 |
19 |
| Adhesion(ST=14/41) |
x/400μm |
30 |
32 |
35 |
| Resolution(ST=14/41) |
400/xμm |
30 |
30 |
35 |
| Resist profile(DL-1229) |
Imaging property of DL-1229 |
 |
 |
| L/S=50/50μm |
DL-1229(ST=14/41) |
| |
*By Paragon-9000m of Orbotech,
Appearance of 1 minute after exposure |
|