- HM series were developed for electro-forming such as metal mask.They have an excellent resolution which contributes fine pattern thick plating.
Features
- Thick resist layer becomes possible by repeating lamination with good
adhesion and resolution.
- Smooth sidewall of plated line due to the smooth resist profile.
Photo characteristics
| Item |
Unit |
HM-4056 |
HM-4075 |
HM-40112 |
| Thickness |
μm |
56 |
75 |
112 |
| Exposure energy* |
mJ/cm2 |
85 |
130 |
270 |
| Adhesion* |
μm |
22 |
35 |
32 |
| Resolution* |
μm |
27 |
35 |
50 |
*:Exposed by collimated light type, Hitachi Test Pattern No.G2, No.3. (PET type)
Physical Properties
| Item |
Condition |
HM-4075 |
Sample A |
| Surface hardness |
*1 Pencil hardness |
Plastic deformation |
HB |
B |
| Cohesive fracture |
4H |
3H |
| Resistance of soldering |
260°C/30 sec. |
Good |
Good |
| X°C/10 sec. |
280°C |
280°C |
Resistance to dipping
in acid agents |
2H-H2 SO4/15min. |
Good |
Good |
| 23°C |
Resistanse to dipping
in orgaic solvent |
IPA/15min./23°C |
Good |
Good |
| MEK/23°C/X sec. |
570 |
120 |
*:JIS K5600-5-4
Resist profile
 |
 |
